A passive and wireless sensor based on LC resonator for ultra-high temperature measurement was designed and fabricated. The sensor consisted of a molybdenum split-ring resonator (SRR) encapsulated by an alumina ceramic matrix. The alumina ceramic matrix served as not only a dielectric material for sensing the temperature variation, but also a protective material for the SRR. The SRR was made of molybdenum by chemical etching, while the alumina ceramic shield was fabricated by spark plasma sintering (SPS). Small amount of MgO was doped into alumina powder to assist the sintering of a fully dense ceramic, preventing the molybdenum ring from high-temperature oxidation. A high temperature measurement system was built to investigate the performance of the fabricated sensor. The temperature measurement ability of the sensor was verified up to 1200 °C, with high sensitivity and good temperature resolution.

中文翻译：

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通过火花等离子体烧结制造的无源无线传感器，用于超高温测量

设计并制造了一种基于LC谐振器的无源无线传感器，用于超高温测量。该传感器由一个氧化铝陶瓷基体封装的钼开口环谐振器（SRR）组成。氧化铝陶瓷基体不仅用作感测温度变化的介电材料，而且还用作SRR的保护材料。SRR由钼通过化学蚀刻制成，而氧化铝陶瓷屏蔽层则通过火花等离子体烧结（SPS）制成。将少量的MgO掺杂到氧化铝粉末中以帮助烧结完全致密的陶瓷，从而防止钼环发生高温氧化。建立了一个高温测量系统来研究所制造传感器的性能。经过验证，传感器的温度测量能力高达1200°C，