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Investigation of laser‐produced plasma multistructuring by floating probe measurements and optical emission spectroscopy
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2020-09-21 , DOI: 10.1002/ppap.202000136 Stefan A. Irimiciuc 1 , Sergii Chertopalov 2 , Valentin Craciun 1, 3 , Michal Novotný 2 , Jan Lancok 2
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2020-09-21 , DOI: 10.1002/ppap.202000136 Stefan A. Irimiciuc 1 , Sergii Chertopalov 2 , Valentin Craciun 1, 3 , Michal Novotný 2 , Jan Lancok 2
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With the continuous development of pulsed laser deposition as a versatile technique for the deposition of complex thin films, there is a need for a better understanding of the role and control of the deposition parameters. The understanding of the particle kinetics and plasma chemistry during the deposition process can greatly improve the properties of the synthesized films. By using the floating voltage regime of the Langmuir probe technique, we performed angular and time‐resolved measurements during laser ablation of an Ag target, which evidenced the structuring of the plasma plume in ultrahigh vacuum conditions. The addition of N2 gas in the pressure range from 5 × 10–5 to 10 Pa leads to more rapid plasma thermalization and the control of its kinetic energy. The electrical measurements were complemented by optical emission spectroscopy, which showcased the presence of neutral and multiple ionized species distributed across the laser‐produced plasma plume. The plasma homogenization resulted in a decrease of the mean free path of Ag ions and atoms, which increased both their excitation temperature and electron density.
中文翻译：
通过浮动探针测量和光发射光谱法研究激光产生的等离子体多重结构
随着脉冲激光沉积作为用于沉积复杂薄膜的通用技术的不断发展，需要更好地理解沉积参数的作用和控制。在沉积过程中对粒子动力学和等离子体化学的理解可以极大地改善合成膜的性能。通过使用Langmuir探针技术的浮动电压机制，我们在激光烧蚀Ag目标的过程中进行了角度和时间分辨的测量，这证明了超高真空条件下等离子羽流的结构。在5×10 –5的压力范围内添加N 2气体到10 Pa会导致更快的等离子体热化及其动能的控制。电气测量得到了光学发射光谱的补充，该光谱显示了在激光产生的等离子体羽流中分布的中性和多种电离物质的存在。等离子体的均质化导致Ag离子和原子的平均自由程减小，从而增加了它们的激发温度和电子密度。
更新日期：2020-11-03
中文翻译：
通过浮动探针测量和光发射光谱法研究激光产生的等离子体多重结构
随着脉冲激光沉积作为用于沉积复杂薄膜的通用技术的不断发展，需要更好地理解沉积参数的作用和控制。在沉积过程中对粒子动力学和等离子体化学的理解可以极大地改善合成膜的性能。通过使用Langmuir探针技术的浮动电压机制，我们在激光烧蚀Ag目标的过程中进行了角度和时间分辨的测量，这证明了超高真空条件下等离子羽流的结构。在5×10 –5的压力范围内添加N 2气体到10 Pa会导致更快的等离子体热化及其动能的控制。电气测量得到了光学发射光谱的补充，该光谱显示了在激光产生的等离子体羽流中分布的中性和多种电离物质的存在。等离子体的均质化导致Ag离子和原子的平均自由程减小，从而增加了它们的激发温度和电子密度。
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