Films deposited on 316L stainless steel plates by plasma-enhanced chemical vapour deposition (PECVD) using hexamethyldisilane (HMDS) in the liquid phase as precursor were studied. We have determined their structural, mechanical, and tribological properties. The samples were deposited at 300 °C with a different self-bias voltage ranging from −150 V to −450 V. The films were characterized by X-Ray photoelectron spectroscopy and infrared absorption spectroscopy to determine the atomic concentrations and identify the chemical environment of the atoms in the films. Raman spectroscopy revealed the presence of carbons with sp² hybridization. The films have a polymeric character, as suggested by the strong luminescence background present in Raman spectra. Nanoindentation technique was used to measure the hardness of the film. Tribological properties were determined by reciprocal linear disc tests. Our results show that the carbon films prepared by PECVD using HMDS as precursors have high hardness and low friction coefficient.

研究了以六甲基乙硅烷（HMDS）为液相，通过等离子体增强化学气相沉积（PECVD）在316L不锈钢板上沉积的薄膜。我们已经确定了它们的结构，机械和摩擦学特性。样品在300°C的条件下以-150 V至-450 V的不同自偏置电压沉积。通过X射线光电子能谱和红外吸收能谱对膜进行表征，以确定原子浓度并鉴定其化学环境。电影中的原子。拉曼光谱显示sp ²存在碳杂交。如在拉曼光谱中存在的强发光背景所暗示的那样，这些膜具有聚合特性。纳米压痕技术用于测量膜的硬度。摩擦学性能是通过往复线性圆盘试验确定的。我们的结果表明，以HMDS为前体通过PECVD制备的碳膜具有高硬度和低摩擦系数。