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Structure of a diamond deposited from microwave plasma by a new gas-jet method
International Journal of Refractory Metals & Hard Materials ( IF 4.2 ) Pub Date : 2020-09-22 , DOI: 10.1016/j.ijrmhm.2020.105386
A.P. Yelisseyev , A.A. Emelyanov , A.K. Rebrov , N.I. Timoshenko , I.B. Yudin , S.A. Gromilov , A.T. Titov , M.Yu Plotnikov

Diamond coatings on a molybdenum substrate were obtained by gas-phase deposition from a high-speed jet of activated gases. In the most common case, diamond film is formed as a result of the appearance of discrete nuclei on the substrate, their growing and competing. We observed the formation of coatings consisting of separate isometric aggregates with different types of packaging (111) or (100) plates depending on the process parameters (gas flow, the H2/CH4 ratio, the substrate temperature). The study of coating morphology using optical and electron scanning microscopy suggests that the particles were in the gas phase for a long time and increased to the size of tens of microns, and then deposited on the substrate. This process can be explained by the charged state of the particles, according to the charged cluster model of Hwang (1996). The study of the structure and phase composition by XRD and Raman spectroscopy revealed amorphous carbon, disordered and crystalline graphite, molybdenum carbide with the dominant contribution of diamond). The broadband luminescence of the coating under UV excitation is related to amorphous carbon, whereas 532 nm excitation causes the glow of vacancy centers such as (NV) and (SiV).



中文翻译:

通过新型气体喷射方法从微波等离子体沉积的金刚石的结构

钼基材上的金刚石涂层是通过气相沉积从活性气体的高速喷射中获得的。在最常见的情况下,金刚石膜的形成是由于基底上离散核的出现,它们的生长和竞争而产生的。我们观察到了由不同等距聚集体组成的涂层的形成,这些涂层具有不同类型的包装(111)或(100)板,具体取决于工艺参数(气流,H 2 / CH 4比率,基板温度)。使用光学和电子扫描显微镜对涂层形态进行的研究表明,颗粒处于气相状态的时间较长,并增加到数十微米的大小,然后沉积在基材上。根据Hwang(1996)的带电簇模型,可以用粒子的带电状态来解释这一过程。通过XRD和拉曼光谱对结构和相组成的研究显示出无定形碳,无序和结晶石墨,碳化钼,其中金刚石占主导地位。在UV激发下涂层的宽带发光涉及无定形碳,而532nm激发导致空位中心,如(NV的辉光- )和(SIV - )。

更新日期:2020-10-14
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