Bulk metallic glasses (amorphous alloys) exhibiting both high hardness and extraordinary thermoplastic forming ability, are perfect mold material for 3D optical microlens array. However, conventional 3D micro fabrication for metallic glass requires Si templates which are extremely costly and eco-unfriendly to machine and demold. In this study, we report a green and low-cost self-aligned multi-ball hot embossing process to create 3D micro dimple array on metallic glass by replicating spherical crowns of self-aligned precision balls. A 3D metallic glass micro dimple array with aperture of 867.2 μm and surface roughness of 8.2 nm was fabricated in 30 s. Different from conventional hot embossing that material full-filled into mold, the new process enables micro dimple fabrication with different specifications by freely controlling the down displacement of balls. Therefore, the relationship between down displacement and depth of micro dimple was revealed through exploring the material flow behavior by a verified FE model. In addition, to test the feasibility of the fabricated metallic glass mold, a PMMA compound eye structure was embossed and its focusing and imaging performance were subsequently evaluated. This research demonstrates a new manufacturing process for rapid fabrication of 3D microlens arrays metallic glass mold in a neat and economic way.

具有高硬度和出色的热塑性成型能力的块状金属玻璃（非晶态合金）是3D光学微透镜阵列的理想模具材料。然而，用于金属玻璃的常规3D微制造需要Si模板，这对于制造和脱模而言非常昂贵且对生态不利。在这项研究中，我们报告了一种绿色且低成本的自对准多球热压花工艺，通过复制自对准精密球的球形冠状结构，在金属玻璃上创建3D微凹坑阵列。在30 s内制作了孔径为867.2μm，表面粗糙度为8.2 nm的3D金属玻璃微凹坑阵列。与传统的热压花工艺不同，传统的热压花工艺将材料完全填充到模具中，新工艺通过自由控制球的向下位移，可以制造具有不同规格的微酒窝。因此，通过验证的有限元模型探索材料的流动行为，揭示了向下位移与微凹坑深度之间的关系。另外，为了测试所制造的金属玻璃模具的可行性，对PMMA复眼结构进行压花，随后评估其聚焦和成像性能。这项研究演示了一种以简洁，经济的方式快速制造3D微透镜阵列金属玻璃模具的新制造工艺。为了测试所制造的金属玻璃模具的可行性，对PMMA复合眼结构进行了压印，然后评估了其聚焦和成像性能。这项研究演示了一种以简洁，经济的方式快速制造3D微透镜阵列金属玻璃模具的新制造工艺。为了测试所制造的金属玻璃模具的可行性，对PMMA复眼结构进行了压印，然后评估了其聚焦和成像性能。这项研究演示了一种以简洁，经济的方式快速制造3D微透镜阵列金属玻璃模具的新制造工艺。