Due to their non-centrosymmetric crystal orientation, wurtzite III-nitride crystals have two distinct orientations, i.e. III-polar and N-polar along the c -axis. Extensive effort has been devoted to polarity control and the characterization of III-nitride thin films. Both III-polar and N-polar films possess some unique features. By taking full advantage of both III and N-polar domains in a single structure, a lateral polarity structure (LPS), where III-polar and N-polar domains are grown side-by-side simultaneously on the wafer, has attracted great interest. In this review, recent progress in the design and fabrication of III-nitride LPS on various substrates is summarized. The structural, optical and electronic properties of III-nitride thin films incorporating LPS are discussed, with special attention paid to the interface between adjacent domains. Various techniques to qualitatively and quantitatively identify the polarity domains are provided, and their applic...

中文翻译：

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III族氮化物薄膜及器件的极性控制及横向极性结构的制备：进展与展望

由于纤锌矿III族氮化物晶体具有非中心对称的晶体取向，因此具有两个不同的取向，即沿c轴的III极和N极。大量的努力已经致力于极性控制和III族氮化物薄膜的表征。III极膜和N极膜均具有一些独特的功能。通过在单个结构中充分利用III和N极性域，横向极性结构（LPS）引起了人们的极大兴趣，在该横向极性结构中，III极性和N极性域同时并排生长在晶圆上。在这篇综述中，总结了在各种基板上设计和制造III族氮化物LPS的最新进展。讨论了掺有LPS的III型氮化物薄膜的结构，光学和电子性质，特别注意相邻域之间的接口。提供了定性和定量识别极性域的各种技术，它们的应用...