Regularities of formation of thin foils (up to 100 μm) of high-entropy alloys (HEAs) of Cr-Fe-Co-Ni-Cu system at electron beam physical vapor deposition (EB-PVD) were studied in the work. Thin foils of CrFeCoNiCu alloy were produced using a single-crucible evaporation with a constant rate of feeding of the alloy into the liquid pool. The influence of deposition temperature on the structure of the produced foils is considered. X-ray methods were used to study the phase composition and the texture of CrFeCoNiCu foils. Foils deposited at temperature below 923 K exhibit a single-FCC structure and low degree of texture. It is shown that increase in deposition temperature to 973 K leads to the transition from the foil microstructure containing almost randomly oriented nanosized crystallites separated by voided boundaries to columnar-like grains microstructure exhibiting a two-component axial 〈111〉 + 〈100〉 texture. Moreover, the increase of deposition temperature to 1023 K results in the transition into dual-FCC phase state. Effect of the structure change on mechanical properties of the deposited foils was analyzed.

研究了Cr-Fe-Co-Ni-Cu体系高熵合金（HEAs）在电子束物理气相沉积（EB-PVD）上形成薄箔（最大100μm）的规律。CrFeCoNiCu合金的薄箔是使用单坩埚蒸发法以恒定速率将合金喂入液池中制成的。考虑沉积温度对所生产的箔的结构的影响。用X射线方法研究了CrFeCoNiCu箔的相组成和织构。在低于923 K的温度下沉积的箔表现出单一的FCC结构和低质地。结果表明，沉积温度升高至973 K导致从包含几乎无规取向的纳米晶粒的箔微结构过渡到由空隙边界分隔的纳米晶粒到具有两组分轴向<111> + <100>织构的柱状晶粒微结构。此外，沉积温度增加到1023 K导致转变为双FCC相态。分析了结构变化对沉积的箔的机械性能的影响。