This paper reports a highly sensitive MEMS silicon‐hair device with novel functions of hair follicle. Human hairy skin has peculiar receptor called hair follicle. Therefore, a highly sensitive sensor reproducing the function of hair follicle is demanded in order to quantify peculiar sense in hairy skin such as wind, static electricity, and perception of the liquid surface. The developed device in this study has fine silicon‐hair with 10 µm width and 5 mm length. Moreover, it detects two‐axis force and one‐axis moment applied to silicon‐hair by piezoresistors. The MEMS silicon‐hair device has realized resolutions of 5 µN axial force, 1 µN shear force, and 3nN·m moment. Also, the device in this study precisely acquired surface tension close to the physical property of water and ethanol water solution. In addition, the MEMS silicon‐hair device was successful in detecting 0.1 µN electrostatic attraction. Resolutions of shear force and moment have been improved by 10‐fold using the resonance‐drive of silicon‐hair.

中文翻译：

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高度灵敏的MEMS硅发装置，可再现毛囊的功能

本文报道了一种具有新型毛囊功能的高度灵敏的MEMS硅毛器件。人的毛状皮肤具有称为毛囊的特殊受体。因此，需要一种能够再现毛囊功能的高度灵敏的传感器，以便量化毛发皮肤中的特殊感觉，例如风，静电和液体表面的感知。在这项研究中开发的设备具有细的硅毛，其宽度为10 µm，长度为5 mm。此外，它还可以检测压电电阻施加在硅毛上的两轴力和一轴力矩。MEMS硅毛器件实现了5 µN轴向力，1 µN剪切力和3nN·m力矩的分辨率。另外，本研究中的设备精确地获得了接近于水和乙醇水溶液物理性质的表面张力。此外，MEMS硅毛器件成功检测出0.1 µN的静电引力。利用硅纤维的共振驱动，剪切力和力矩的分辨率提高了10倍。