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Selective deposition of p-type Cu2O or conductive Cu thin film at 180∘C in air on a quartz glass substrate: Development of an aqueous spray solution using two-compartment electrolysis system
Functional Materials Letters ( IF 1.2 ) Pub Date : 2020-01-31 , DOI: 10.1142/s1793604720510121
Alina Uusiku 1 , Hiroki Nagai 2 , Mitsunobu Sato 2
Affiliation  

A conductive Cu thin film with a thickness of 170[Formula: see text]nm, electrical resistivity of 8.9(2) [Formula: see text][Formula: see text]cm and adhesion strength of 12(7) MPa was fabricated at 180C in air. The spray solutions were prepared by electrolyzing Cu electrodes in an aqueous solution of ammonium formate, and then by adding ethylenediamine-N, N, N[Formula: see text], N[Formula: see text]-tetraacetic acid (EDTA). The surface morphology image of resultant Cu thin film, observed by a field emission scanning electron microscope, revealed Cu grains with particle sizes of ca. [Formula: see text][Formula: see text]nm. It was indicated that the Cu complex containing EDTA ligand in the spray solution plays important roles to (1) provide enough amount of carbon atoms as a reducing agent for phase transition of its coordinated Cu[Formula: see text] to crystalline Cu0 and (2) prevent the product from oxidation under atmospheric O2 during spray coating.

中文翻译:

在石英玻璃基板上在空气中于 180°C 选择性沉积 p 型 Cu2O 或导电 Cu 薄膜:使用两室电解系统开发水喷雾溶液

制备厚度为 170[公式:见正文]nm、电阻率为 8.9(2) [公式:见正文][公式:见正文]cm、粘附强度为 12(7) MPa 的导电铜薄膜180C 在空气中。通过在甲酸铵水溶液中电解Cu电极,然后加入乙二胺-N、N、N[分子式:见正文]、N[分子式:见正文]-四乙酸(EDTA)制备喷雾溶液。通过场发射扫描电子显微镜观察所得铜薄膜的表面形态图像,显示粒径约为 1 的铜晶粒。[公式:见正文][公式:见正文]nm. 表明喷雾溶液中含有 EDTA 配体的 Cu 配合物对 (1) 提供足够量的碳原子作为还原剂,使其配位的 Cu [分子式:见正文] 相转变为结晶 Cu0(2) 防止产品在大气 O 下氧化2在喷涂过程中。
更新日期:2020-01-31
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