Abstract The paper reports on implantation damage accumulation, Ag distribution and the interior morphology in different crystallographic orientations of implanted samples of cubic yttria-stabilised zirconia (YSZ). (100)-, (110)- and (111)-oriented YSZ was implanted with 400-keV Ag+ ions at ion fluences from 5 × 1014 to 5 × 1016 cm−2. Rutherford backscattering spectrometry (RBS) in the channelling mode (RBS-C), as well as X-ray diffraction (XRD), were used for the quantitative measurement of the lattice disorder and Ag distribution. The defect propagation and Ag accumulation were observed using transmission electron microscopy (TEM) with the energy-dispersive X-ray spectroscopy (EDX). Although similar damage evolution trends were observed along with all channelling directions, the disorder accumulation is lower along the direction than along the and direction. The damage extends much deeper than the theoretically predicted depths. It is attributed to long-range defect migration effects, confirmed by TEM. At the ion fluence of 5 × 1016 cm−2, nanometre-sized Ag precipitates were identified in the depth of 30–130 nm based on the Ag concentration–depth profiles determined by RBS.

中文翻译：

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离子注入制备的Ag:YSZ纳米复合材料的多向沟道研究

摘要 本文报道了立方氧化钇稳定氧化锆 (YSZ) 注入样品在不同晶向的注入损伤积累、Ag 分布和内部形貌。在 (100)-、(110)- 和 (111) 取向的 YSZ 中注入 400-keV Ag+ 离子，离子注量从 5 × 1014 到 5 × 1016 cm-2。通道模式 (RBS-C) 下的卢瑟福背散射光谱 (RBS) 以及 X 射线衍射 (XRD) 用于定量测量晶格无序和 Ag 分布。使用透射电子显微镜 (TEM) 和能量色散 X 射线光谱 (EDX) 观察缺陷传播和 Ag 积累。尽管在所有通道方向上都观察到了类似的损伤演变趋势，无序积累沿方向低于沿和方向。损坏范围比理论上预测的深度要深得多。这归因于长程缺陷迁移效应，由 TEM 证实。在 5 × 1016 cm-2 的离子注量下，基于 RBS 确定的 Ag 浓度-深度分布，在 30-130 nm 的深度处识别出纳米尺寸的 Ag 沉淀物。