In this study, we demonstrated a limiting current-type yttria-stabilized zirconia thin-film oxygen sensor with a gas diffusion layer composed of porous Pt and spiral Ta₂O₅, which were deposited via sputtering and rotational oblique evaporation, respectively. The rate of the oxygen gas diffusion through the porous Pt and spiral Ta₂O₅ films defined the limiting current level of the oxygen sensor. When evaporation angle was between 70° and 84°, the relative density of the spiral Ta₂O₅ was between 0.72 and 0.37. The microstructure of the spiral Ta₂O₅ film was maintained after annealing at 700 °C for 1 h. The characteristics of the limiting current were clearly observed between 400 °C and 600 °C, which can be attributed to the oxygen gas diffusion rate in the spiral Ta₂O₅ film. The current response time was 3 s or less after applying the voltage. The level of the limiting current was directly correlated with the oxygen gas concentration. Owing to the thermally stable spiral Ta₂O₅ microstructure, the characteristics of the limiting current, including the limiting current level and response time, were confirmed to be consistent for up to ten cycles of temperature modulations. The oxygen gas concentration and water vapor were separately measured by applying 1.1 V and 1.8 V, respectively. The presence of CO₂ and H₂ did not affect the limiting current level for its application in the atmosphere.

在这项研究中，我们展示了一种限流型氧化钇稳定的氧化锆薄膜氧气传感器，其气体扩散层由多孔Pt和螺旋Ta ₂ O _5组成，分别通过溅射和旋转倾斜蒸发沉积。氧气通过多孔Pt和Ta ₂ O ₅螺旋薄膜的扩散速率确定了氧气传感器的极限电流水平。当蒸发角在70°至84°之间时，螺旋Ta ₂ O ₅的相对密度在0.72至0.37之间。螺旋Ta ₂ O ₅的微观结构在700°C退火1小时后，保持薄膜。在400°C至600°C之间清楚地观察到极限电流的特性，这可以归因于螺旋Ta ₂ O ₅膜中的氧气扩散速率。施加电压后，电流响应时间为3秒或更短。极限电流的水平与氧气浓度直接相关。由于热稳定的螺旋Ta ₂ O ₅在微观结构上，极限电流的特性（包括极限电流水平和响应时间）被确认在多达十个温度调制循环中是一致的。通过分别施加1.1V和1.8V分别测量氧气浓度和水蒸气。CO ₂和H ₂的存在不影响其在大气中的极限电流水平。