Elemental analysis of specimens at the microscale is very important in various fields. To capture a three-dimensional (3D) elemental image, we developed a sequential computed tomography (CT) system comprising particle-induced X-ray emission (PIXE)-micron-CT and PIXE-CT. This system can image samples with sizes ranging from several µm to 1000 µm. We applied this system to capture 3D elemental images of iron (Fe), titanium (Ti) and cesium (Cs) in samples ranging in size from 50 to 100 µm. Ti and Fe were easily measured by both micron-CT and PIXE-CT, and the results obtained were consistent between the two systems.

中文翻译：

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使用离子微束开发3D成像系统

在各个领域，对标本进行微量元素分析非常重要。为了捕获三维（3D）元素图像，我们开发了一种顺序计算机断层扫描（CT）系统，该系统包括粒子诱发的X射线发射（PIXE）-micron-CT和PIXE-CT。该系统可以对尺寸范围从几微米到1000微米的样品成像。我们应用了该系统来捕获尺寸从50到100 µm的样品中铁（Fe），钛（Ti）和铯（Cs）的3D元素图像。微米-CT和PIXE-CT均可轻松测量Ti和Fe，并且两种系统的结果一致。