Abstract Using the magnetic sputtering technique, the SnO2/Ag/SnO2 tri-layer transparent films were fabricated on float glasses successfully. Compared with the commercial FTO (F-doped SnO2) film, the SnO2/Ag/SnO2 tri-layer films have higher visible-light transmittance and better conductivity. The total thickness of the SnO2/Ag/SnO2 films is one third of the commercial FTO film leading to the high visible-light transmittance. The high carrier concentration of the SnO2/Ag/SnO2 films contributes to the tri-layer films’ low resistivity. In addition, to further improve the performance of the SnO2/Ag/SnO2 tri-layer films, samples were annealed under different temperatures. The results illustrate that the lowest sheet resistance (5.92 Ω/sq) and the highest visible-light transmittance (87.0%) were obtained after annealing at 200 °C. Furthermore, the thermal stability of the films could be enhanced by a multi-step annealing process due to the recrystallization effect.

中文翻译：

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磁溅射沉积SnO2/Ag/SnO2三层透明导体的制备及热稳定性

摘要 利用磁力溅射技术，成功地在浮法玻璃上制备了SnO2/Ag/SnO2三层透明薄膜。与商用 FTO（F 掺杂 SnO2）薄膜相比，SnO2/Ag/SnO2 三层薄膜具有更高的可见光透射率和更好的导电性。SnO2/Ag/SnO2 薄膜的总厚度是商用 FTO 薄膜的三分之一，因此具有较高的可见光透射率。SnO2/Ag/SnO2 薄膜的高载流子浓度有助于三层薄膜的低电阻率。此外，为了进一步提高 SnO2/Ag/SnO2 三层薄膜的性能，样品在不同温度下退火。结果表明，在 200 °C 退火后获得最低的薄层电阻 (5.92 Ω/sq) 和最高的可见光透射率 (87.0%)。此外，