A sinusoidally-excited Venturi-DBD operating in neon has been investigated. The Ne(1s 5 ) metastable density has been quantified spatially resolved using laser atomic absorption spectroscopy for different pressure levels. Density values of up to 7 · 10 16 m −3 could be determined at atmospheric pressure and up to 3 · 10 16 m −3 at 100 mbar. For all investigated parameters, the Ne(1s 5 ) density was found to be distinctly higher in the proximity of the cathode than in the anode region. Complementary investigations of the discharge development using phase-resolved optical emission spectroscopy complete the characterization of the device. The discharge was found to show typical properties of a glow-like discharge regarding current waveform and luminosity distribution. In addition, the influence of nitrogen and oxygen impurities and admixtures in the process gas has been determined. A substantial impact was found on both the ...

中文翻译：

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大气压和中压下氖气操作DBD的光谱研究

已经研究了在氖气中工作的正弦激励的Venturi-DBD。Ne（1s 5）亚稳态密度已使用激光原子吸收光谱法针对不同压力水平在空间上进行了定量分析。在大气压下可以确定最高7·10 16 m -3的密度值，而在100 mbar下可以确定最高3·10 16 m -3的密度值。对于所有研究的参数，发现在阴极附近的Ne（1s 5）密度明显高于阳极区域。使用相分辨光发射光谱对放电进行的补充研究完成了该设备的特性。发现该放电显示出关于电流波形和发光度分布的类似辉光放电的典型特性。此外，确定了工艺气体中氮和氧杂质及混合物的影响。发现对...