This article presents a superconducting material based planar broadband 3-way Wilkinson power divider which can be used in the Josephson quantum voltage device for the voltage standards. The 3-way Wilkinson power divider aims to improve the integration of Josephson voltage device compared to the commonly used 2-way power divider. A two-stage λ/4 section on each branch is used to increase the bandwidth, and a π model with lumped equivalent elements are used to further decrease physical dimension in device area. Different from the conventional spatial design of N-way Wilkinson power divider, this work designs a planar broadband 3-way divider to be compatible with the on-chip fabrication process. Simulation results show that the insert loss is below 0.18 dB at working bandwidth of 16.7∼23 GHz, the division imbalance of each branch is below 0.044 dB, and the input and output reflection is better than 15 and 11.9 dB, respectively. The isolation between any of the three output ports is better than 11.8 dB. All these indexes satisfy the requirement of the Josephson voltage standard application. To further prove the validity of our design, real device based on superconducting material is realized and characterized. Devices with a 3-way power divider and three 2-stacked Josephson junction arrays with 256 junctions in each array are fabricated. The experiment results indicate the potential usage of our design in quantum voltage standard devices for high-voltage output.

中文翻译：

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用于约瑟夫森电压电路的片上平面宽带三路功率分配器

本文介绍了一种基于超导材料的平面宽带三路威尔金森功率分配器，可用于约瑟夫森量子电压器件的电压标准。与常用的 2 路功率分配器相比，3 路威尔金森功率分配器旨在提高约瑟夫森电压器件的集成度。每个分支上的两级 λ/4 部分用于增加带宽，并使用具有集总等效元件的 π 模型进一步减小器件面积的物理尺寸。与传统的 N 路威尔金森功率分配器空间设计不同，本工作设计了一种平面宽带 3 路分配器，以兼容片上制造工艺。仿真结果表明，工作带宽16.7∼23 GHz时插入损耗低于0.18 dB，各支路分频不平衡低于0.044 dB，输入和输出反射分别优于15和11.9 dB。三个输出端口之间的隔离度优于 11.8 dB。所有这些指标均满足约瑟夫森电压标准应用的要求。为了进一步证明我们设计的有效性，实现并表征了基于超导材料的真实器件。制造了具有 3 路功率分配器和三个 2 堆叠约瑟夫森结阵列的器件，每个阵列中有 256 个结。实验结果表明我们的设计在用于高压输出的量子电压标准器件中的潜在用途。所有这些指标均满足约瑟夫森电压标准应用的要求。为了进一步证明我们设计的有效性，实现并表征了基于超导材料的真实器件。制造了具有 3 路功率分配器和三个 2 堆叠约瑟夫森结阵列的器件，每个阵列中有 256 个结。实验结果表明我们的设计在用于高压输出的量子电压标准器件中的潜在用途。所有这些指标均满足约瑟夫森电压标准应用的要求。为了进一步证明我们设计的有效性，实现并表征了基于超导材料的真实器件。制造了具有 3 路功率分配器和三个 2 堆叠约瑟夫森结阵列的器件，每个阵列中有 256 个结。实验结果表明我们的设计在用于高压输出的量子电压标准器件中的潜在用途。