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Structural Color Surface on Transparent PDMS Fabricated by Carbon-assisted Laser Interference Lithography for Real-time Quantification of Soft Actuators Motion.
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2020-09-16 , DOI: 10.1021/acsami.0c14019 Chenchu Zhang 1 , Renfei Chen 1 , Lulu Yang 1 , Hao Wu 2 , Shengyun Ji 2 , Jianming Zhang 1 , Lihua Zhou 1 , Hanchang Ye 1 , Sizhu Wu 3 , Jingjing Zhang 4 , Chaowei Wang 2 , Ying Hu 1
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2020-09-16 , DOI: 10.1021/acsami.0c14019 Chenchu Zhang 1 , Renfei Chen 1 , Lulu Yang 1 , Hao Wu 2 , Shengyun Ji 2 , Jianming Zhang 1 , Lihua Zhou 1 , Hanchang Ye 1 , Sizhu Wu 3 , Jingjing Zhang 4 , Chaowei Wang 2 , Ying Hu 1
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Dynamic and real-time monitoring of the motion state of soft actuators is of great significance for optimizing their performance. However, present noncontact measurement approaches based on diffractive groove arrays fabricated by imprinting have some limitation, e.g., the grooves should be processed before the solidification of soft materials or the depth and period of grooves cannot be flexibly adjusted. Here, a flexible and high-efficiency fabrication approach carbon-assisted laser interference lithography (CLIL) for periodical groove structures with structural color is proposed. This technique is to irradiate the interference laser on the PDMS surface coated by a carbon layer, which is used for enhanced laser absorption. The processing parameters are systematically studied and optimized to achieve a bright structural color. Benefiting from the advantages of CLIL, the structural color can be processed on a solidified transparent surface with controllable characteristics such as groove period and depth. Lastly, the motion of an electric-driven actuator can be real-time quantified by calibrating the relationship between the observation angle and the observed structural color.
中文翻译：
碳纤维辅助激光干涉光刻技术在透明PDMS上制造的结构彩色表面，用于实时量化软致动器的运动。
动态和实时监视软执行器的运动状态对于优化其性能具有重要意义。然而，目前的基于通过压印制造的衍射凹槽阵列的非接触式测量方法具有一定的局限性，例如，在软材料的固化之前或在凹槽的深度和周期不能灵活调整之前，应对凹槽进行处理。在此，针对具有结构颜色的周期性凹槽结构，提出了一种灵活高效的碳辅助激光干涉光刻技术。该技术是将干涉激光照射到被碳层覆盖的PDMS表面上，该碳层用于增强激光吸收。系统地研究和优化了加工参数，以实现明亮的结构颜色。得益于CLIL的优势，可以在固化的透明表面上处理具有可控特性（例如凹槽周期和深度）的结构色。最后，可以通过校准观察角度和观察到的结构颜色之间的关系来实时量化电动执行器的运动。
更新日期：2020-10-07
中文翻译：
碳纤维辅助激光干涉光刻技术在透明PDMS上制造的结构彩色表面，用于实时量化软致动器的运动。
动态和实时监视软执行器的运动状态对于优化其性能具有重要意义。然而，目前的基于通过压印制造的衍射凹槽阵列的非接触式测量方法具有一定的局限性，例如，在软材料的固化之前或在凹槽的深度和周期不能灵活调整之前，应对凹槽进行处理。在此，针对具有结构颜色的周期性凹槽结构，提出了一种灵活高效的碳辅助激光干涉光刻技术。该技术是将干涉激光照射到被碳层覆盖的PDMS表面上，该碳层用于增强激光吸收。系统地研究和优化了加工参数，以实现明亮的结构颜色。得益于CLIL的优势，可以在固化的透明表面上处理具有可控特性（例如凹槽周期和深度）的结构色。最后，可以通过校准观察角度和观察到的结构颜色之间的关系来实时量化电动执行器的运动。
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