As the final step to fabricate the optical parts, the deterministic polishing process is usually used to reduce the roughness and correct the surface form. In this article, a new compensation metho...

中文翻译：

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基于进给率优化的确定性抛光面形误差补偿方法研究

作为制造光学零件的最后一步，通常使用确定性抛光工艺来降低粗糙度和修正表面形状。在本文中，一种新的补偿方法...