Abstract Single-crystal sapphire is an important material with increasingly more widespread applications in optics, semiconductor and laser-related devices. However, its high hardness and brittleness have posed significant challenges for the efficient machining of sapphire with a satisfactory surface integrity. In this work, a new lapping process was developed for sapphire using a novel suspension that was made by dimensionally integrating alumina (Al2O3) nanoparticles with graphene oxide (GO) nanosheets in pure water. The performance of the Al2O3/GO hybrid nanosuspensions in the lapping of sapphire was systematically investigated using commercial diamond suspensions as the benchmarks. The multidisciplinary science involved in the new lapping process was unveiled. The use of the hybrid nanosuspensions during lapping enabled the generation of an oxide layer on the sapphire surface that was softer than its pristine substrate. This process thus simultaneously improved the removal efficiency and enhanced the surface quality, in comparison to conventional lapping.

中文翻译：

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一种使用混合纳米颗粒悬浮液的新型单晶蓝宝石研磨工艺

摘要 单晶蓝宝石是一种重要的材料，在光学、半导体和激光相关器件中的应用越来越广泛。然而，其高硬度和脆性对有效加工具有令人满意的表面完整性的蓝宝石提出了重大挑战。在这项工作中，使用新型悬浮液开发了一种新的蓝宝石研磨工艺，该悬浮液是通过将氧化铝 (Al2O3) 纳米颗粒与氧化石墨烯 (GO) 纳米片在纯水中进行尺寸整合而制成的。使用商业金刚石悬浮液作为基准，系统地研究了 Al2O3/GO 混合纳米悬浮液在蓝宝石研磨中的性能。新研磨工艺中涉及的多学科科学被揭开面纱。在研磨过程中使用混合纳米悬浮液能够在蓝宝石表面生成比其原始衬底更软的氧化物层。因此，与传统研磨相比，该工艺同时提高了去除效率并提高了表面质量。