The effects of He-ion irradiation on the microstructures and the mechanical, thermal properties of sputter-deposited nanocolumnar tungsten thin films have been studied. 200 keV He⁺ ion irradiation with a fluence of 2x10¹⁷ ions/cm² was performed in the growth direction of the W thin films. Small scale mechanical testing methods, such as nanoindentation and square membrane deflection experiments, were carried out, and the thermal conductivity measurement was performed based on the electrical resistivity measurement and the Wiedemann–Franz law for the unirradiated and irradiated W thin films. It was revealed that the properties in the out-of-plane direction are not changed much, but a significant degradation occurs in the in-plane direction after the He-ion irradiation. The microstructure of the film and the distribution of He-ion induced damages are responsible for the anisotropic property changes by He-ion irradiation.

研究了氦离子辐照对溅射沉积纳米柱状钨薄膜的微观结构和力学，热学性能的影响。200 keV He ⁺离子辐照，通量为2x10 ¹⁷离子/ cm ²在W薄膜的生长方向上进行。进行了小规模的机械测试方法，例如纳米压痕和方形膜偏转实验，并基于电阻率测量和Wiedemann-Franz定律对未辐照和辐照的W薄膜进行了热导率测量。揭示了面外方向上的性质变化不大，但是在He-离子照射之后，在面内方向上发生了显着的劣化。薄膜的微观结构和He离子引起的损伤的分布是He离子辐照引起的各向异性变化的原因。