The air-conditioning system in modern industrial cleanrooms can be very energy intensive due to large air change rates per hour and high airflow resistance. This study focuses on the actual performance and potential improvements of the filtration and ventilation process in cleanrooms. On-site measurements were conducted in three semiconductor cleanrooms to investigate the actual performance of clean air-conditioning systems. The results reveal that the unmatched particle concentrations of outdoor air and return air increase the filtration load. The indoor workshops are often guaranteed excessively, leading to large amount of redundant airflow rates. Both make the actual ventilation system energy intensive. Therefore, a new air filtration and ventilation system in industrial cleanrooms is introduced in this research. The proposed system filters outdoor air and return air separately before mixture and avoids their mixing loss. It indicates that 25.8% to 45.0% of the total energy can be reduced due to lower airflow resistance. Proper return airflow rate of the cleanrooms are proposed to avoid airflow redundancy, and as a result, 32.9% to 50.7% of potential energy can be saved compared with the original system.

由于每小时较大的换气速度和较高的气流阻力，现代工业洁净室中的空调系统可能会非常耗能。这项研究的重点是洁净室中过滤和通风过程的实际性能和潜在的改进。在三个半导体洁净室中进行了现场测量，以研究洁净空调系统的实际性能。结果表明，室外空气和回风的颗粒浓度不匹配会增加过滤负荷。通常会过度保证室内车间，从而导致大量的多余气流。两者都使实际的通风系统耗能。因此，本研究引入了一种新型的工业洁净室空气过滤和通风系统。建议的系统在混合之前分别过滤室外空气和返回空气，并避免混合损失。这表明由于降低了气流阻力，可以减少总能量的25.8％至45.0％。提出了洁净室的适当回风率以避免气流冗余，与原始系统相比，可以节省32.9％至50.7％的潜在能量。