Low pressure (<30 mTorr) capacitively coupled plasmas (CCP) are important for many plasma processing applications. Due to high energy of electrons in these plasmas and long electron mean free path, kinetic phenomena dominate the electron behavior. A multi-dimensional particle-in-cell (PIC) model is utilized to study the physics of sub-100 mTorr Ar CCPs in this article. A one-dimensional model for helium plasma in the 30–300 mTorr pressure range is first used to benchmark the PIC code against published results by Turner et al [2013 Phys. Plasmas 013507]. The article then focuses on two-dimensional modeling of the gaseous electronics conference (GEC) reference cell in cylindrical geometry. Computed ion density and DC bias voltage at 100 mTorr are compared to available experimental data for a range of radio frequency voltages, demonstrating good agreement. The validated model is used to examine Ar plasmas in the GEC reference cell in the 12.5–100 mTorr pressure ran...

中文翻译：

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低压电容耦合等离子体中的均匀性和非局部传输

低压（<30 mTorr）电容耦合等离子体（CCP）对于许多等离子体处理应用而言非常重要。由于这些等离子体中电子的高能量和长的电子平均自由程，动力学现象主导着电子行为。本文使用多维细胞内颗粒（PIC）模型研究亚100 mTorr Ar CCP的物理性质。首先使用30-300 mTorr压力范围内的一维氦等离子体模型将PIC代码与Turner等人[2013 Phys。等离子013507]。然后，本文重点介绍圆柱几何中的气态电子会议（GEC）参考单元的二维建模。在一定范围的射频电压下，将100 mTorr的计算离子密度和DC偏置电压与可用的实验数据进行比较，表现出良好的协议。经过验证的模型用于在12.5–100 mTorr压力范围内检查GEC参考电池中的Ar等离子体。