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Direct writing of Cu-based micropatterns inside Cu2O nanosphere films using green femtosecond laser reductive sintering
Optical Materials Express ( IF 2.8 ) Pub Date : 2020-09-16 , DOI: 10.1364/ome.401676
Mizue Mizoshiri , Atsushi Tanokuchi

Cu-based micropatterns were fabricated using reductive sintering inside Cu2O nanosphere films induced by green femtosecond laser pulses. The linear and nonlinear absorption coefficients of Cu2O nanosphere films composed of Cu2O nanospheres, polyvinylpyrrolidone, and 2-propanol were 0.062 × 104 /cm and 10−50 cm/GW, respectively. The minimum line width was the same as the laser spot diameter (∼0.7 µm), indicating negligible thermal diffusion for metallization. Cu-based micropatterns with different heights were formed by varying the position of the focal spot along the z-axis by focusing the laser pulses on the films and then scanning. This technique is applied to three-dimensional microfabrication.

中文翻译:

使用绿色飞秒激光还原烧结在 Cu2O 纳米球膜内直接写入 Cu 基微图案

使用由绿色飞秒激光脉冲诱导的 Cu2O 纳米球膜内部的还原烧结来制造基于 Cu 的微图案。由Cu2O纳米球、聚乙烯吡咯烷酮和2-丙醇组成的Cu2O纳米球薄膜的线性和非线性吸收系数分别为0.062×104/cm和10-50cm/GW。最小线宽与激光光斑直径(~0.7 µm)相同,表明金属化的热扩散可以忽略不计。通过将激光脉冲聚焦在薄膜上然后扫描,改变焦斑沿 z 轴的位置,形成具有不同高度的铜基微图案。该技术应用于三维微细加工。
更新日期:2020-09-16
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