Chalcogenide-oxide Bragg reflectors and a 1-D vertical cavity for operation at 1.55 µm were designed and fabricated via radio-frequency sputtering. The Bragg reflectors were made out of repeating layers of Al2O3 and As2Se3, and the cavity was obtained via a Ga5Ge20Sb10S65:Er3+ defect layer. The layers’ properties were assessed via ellipsometry and SEM imaging. Transmission spectroscopy verifies the appearance of a well-defined stop-band centered around 1.5 µm with a very wide bandgap, and extremely low transmission, even with a relatively low layer count. The vertical optical cavity fabrication results in the appearance of a resonance within the band, at a wavelength corresponding to the 4I13/2→4I15/2 transition of erbium. The high transmittance at 808 and 980 nm allows for optical pumping, and thus light amplification and coherent light generation from the cavity. The operation of these devices was investigated, showing coherent light emission at 1.5 µm. The results are encouraging in assessing the viability of this design and these materials for operation in the near-infrared range, providing an important step towards the fabrication of chalcogenide-based optical amplifiers for the near-infrared.

中文翻译：

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用于近红外操作的硫族化物基 Er3+ 掺杂垂直光学腔的射频溅射制造

通过射频溅射设计和制造了硫属化物氧化物布拉格反射器和用于在 1.55 µm 下运行的一维垂直腔。布拉格反射器由重复的 Al2O3 和 As2Se3 层制成，腔体通过 Ga5Ge20Sb10S65:Er3+ 缺陷层获得。通过椭圆光度法和 SEM 成像评估层的特性。透射光谱验证了以 1.5 µm 为中心的定义明确的阻带的外观，具有非常宽的带隙和极低的透射率，即使层数相对较少。垂直光学腔制造导致在波段内出现共振，其波长对应于铒的 4I13/2→4I15/2 跃迁。808 和 980 nm 处的高透射率允许光泵浦，从而光放大和从腔产生相干光。研究了这些器件的操作，显示出 1.5 µm 的相干光发射。在评估这种设计和这些材料在近红外范围内工作的可行性方面，结果令人鼓舞，为制造用于近红外的基于硫属化物的光放大器迈出了重要的一步。