This paper presents the design, optimization, fabrication and characterization of a symmetrical two-axis tilt angle sensor. The sensor consists of a globe-calotte-shaped excitation electrode and two pairs of sensing electrodes of the same dimensions, positioned symmetrically on a 3D printed hollow sphere. The sphere is filled with oil and air, and then mounted on the surface of a printed circuit board (PCB) for mechanical packaging and measurement. Experimental results show that the sensor can measure the tilt angle in both the x- and y-axes with sensitivity of 124 mV/° and resolution of ±0.15° in the range from −35° to 35°. The characteristics of the sensor on the x- and y-axes are similar. The proposed sensor can be used in several applications.

本文介绍了对称双轴倾角传感器的设计、优化、制造和表征。该传感器由球形圆顶形激励电极和两对相同尺寸的感应电极组成，对称放置在 3D 打印的空心球体上。球体充满油和空气，然后安装在印刷电路板（PCB）的表面上进行机械封装和测量。实验结果表明，该传感器可以在-35°至35°范围内以124 mV/°的灵敏度和±0.15°的分辨率测量x轴和y轴的倾角。传感器在x - 和y方向上的特性-轴相似。所提出的传感器可用于多种应用。