Free-form optics are becoming increasingly indispensible in a series of industries, such as aviation, aerospace, medical, digital video and audio optoelectronics, owing to its enhanced optical performance, fewer surfaces, lower mass, lower cost, smaller package-size and reduced stray-light, etc. However, the ultra-precision machining of free-form surface optics, especially the non-rotational asymmetric free-form optics is still faces a great challenge. In this study, ultra-precision grinding of the non-rotational asymmetric biconical free-form optics with raster grinding path was studied. Firstly, a novel feeding compensation truing strategy for truing the arc-shape grinding wheels with high-precision was proposed. A D46 μm metal-bonded grinding wheel and a D7μm resin-bonded diamond wheel, were successfully trued with high profile accuracy and desired surface topography. Subsequently, the influence of the significant grinding factors like grinding path, scallop height, contact arc length and the grinding wheel wear on the ground profile accuracy and surface quality of the biconical free-form optics was theoretically and and experimentally analyzed. Eventually, a larger size monocrystalline silicon biconical free-form optics with profile accuracy 6.0 μm and nanometer surface roughness was successfully manufactured by raster grinding combined the technology introduced in this paper.

由于其增强的光学性能，更少的表面，更低的质量，更低的成本，更小的封装尺寸以及更小的尺寸，自由形式的光学在航空，航天，医疗，数字视频和音频光电等一系列行业中变得越来越不可缺少。然而，自由曲面光学器件，特别是非旋转非对称自由曲面光学器件的超精密加工仍然面临着巨大的挑战。在这项研究中，研究了具有光栅磨削路径的非旋转非对称双圆锥自由曲面光学器件的超精密磨削。首先，提出了一种新型的弧形砂轮高精度修整补偿策略。一个D46μm金属粘结的砂轮和一个D7μm树脂粘结的金刚石砂轮，高轮廓精度和所需的表面形貌已成功实现。随后，从理论上和实验上分析了重要的磨削因素，如磨削路径，扇贝高度，接触弧长和砂轮磨损对双锥自由曲面光学器件的轮廓精度和表面质量的影响。最终，结合本文介绍的技术，通过光栅研磨成功制造了轮廓精度为6.0μm且具有纳米表面粗糙度的较大尺寸的单晶硅双锥自由形光学器件。理论上和实验上分析了接触弧长和砂轮磨损对地面轮廓精度和双锥自由曲面光学器件的表面质量的影响。最终，结合本文介绍的技术，通过光栅研磨成功制造了轮廓精度为6.0μm且具有纳米表面粗糙度的较大尺寸的单晶硅双锥自由形光学器件。理论上和实验上分析了接触弧长和砂轮磨损对地面轮廓精度和双锥自由曲面光学器件的表面质量的影响。最终，结合本文介绍的技术，通过光栅研磨成功制造了轮廓精度为6.0μm且具有纳米表面粗糙度的较大尺寸的单晶硅双锥自由形光学器件。