Multilayer tin oxide/gold/tin oxide (SnO 2 /Au/SnO 2 ) was deposited by atomic layer deposition and an e-beam evaporator. The structural, electrical, and optical properties of the SnO 2 /Au/SnO 2 multilayer were investigated. Au formed islands at a thickness less than 3 nm. As the Au interlayer thickness increased, the Au islands merged, resulting in a continuous film 12 nm thick. As the Au interlayer thickness increased from 0 to 12 nm, the carrier concentration and Hall mobility increased to 2.41 × 10 22 cm −3 and 11.96 cm 2 V −1 s −1 , respectively. As a result, the resistivity decreased at 10 −5 Ω cm with an increasing Au interlayer thickness compared to a SnO 2 single layer. In addition, optical transmittance at 550 nm increased by more than 80% at 6 and 9 nm than at Au thicknesses of 3 and 12 nm. SnO 2 /Au/SnO 2 multilayers are promising candidates a...

中文翻译：

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具有不同Au厚度的SnO 2 / Au / SnO 2多层作为透明导电氧化物的调谐特性

通过原子层沉积和电子束蒸发器沉积多层氧化锡/金/氧化锡（SnO 2 / Au / SnO 2）。研究了SnO 2 / Au / SnO 2多层膜的结构，电学和光学性质。金形成的岛的厚度小于3nm。随着Au中间层厚度的增加，Au岛合并，从而形成12 nm厚的连续膜。随着Au中间层厚度从0增加到12nm，载流子浓度和霍尔迁移率分别增加到2.41×10 22 cm -3和11.96cm 2 V -1 s -1。结果，与SnO 2单层相比，随着Au中间层厚度的增加，电阻率在10 -5Ωcm处降低。另外，与3和12nm的金厚度相比，在6和9nm下在550nm下的透光率增加了80％以上。