Soft errors are widely recognized as a reliability issue, and are a circuit malfunction caused by particle radiation. Identifying soft-error sensitive volumes of a semiconductor circuit is useful for evaluating soft-error sensitivity and developing countermeasures against soft errors. This paper quantifies the spatial resolution of soft-error sensitive-volume analysis by scanning two-photon absorption laser microscopy. We identify the critical parameter determining the spatial resolution in the depth direction and demonstrate that optimal parameter selection can extract soft-error sensitive depths of current LSIs.

中文翻译：

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通过扫描两光子吸收激光显微镜对软误差敏感深度分析的空间分辨率

软错误被广泛认为是可靠性问题，并且是由粒子辐射引起的电路故障。识别半导体电路的对软错误敏感的体积对于评估对软错误的敏感性以及开发针对软错误的对策很有用。本文通过扫描双光子吸收激光显微镜对软误差敏感体积分析的空间分辨率进行了量化。我们确定了确定深度方向空间分辨率的关键参数，并证明了最佳参数选择可以提取当前LSI的软错误敏感深度。