This paper presents a straightforward, low-cost, and effective integration process for the fabrication of membrane gate thin film transistors (TFTs) with an air gap. The membrane gate TFT with an air gap can be used as the highly sensitive tactile force sensor. The suspended membrane gate with an air gap as the insulator layer is formed by multiple photolithography steps and photoresist sacrificial layers. The viscosity of the photoresist and the spin speed was used to modify the thickness of the air gap during the coating process. The tactile force was measured by monitoring the drain current of the TFT as the force changed the thickness of the air gap. The sensitivity of the devices was enhanced by an optimal gate size and low Young’s modulus of the gate material. This simple process has the potential for the production of small, versatile, and highly sensitive sensors.

中文翻译：

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带悬栅的双栅薄膜晶体管，适用于触觉力传感器。

本文提出了一种简单，低成本，有效的集成工艺，用于制造具有气隙的膜栅薄膜晶体管（TFT）。具有气隙的薄膜栅TFT可以用作高灵敏度的触觉力传感器。通过多个光刻步骤和光致抗蚀剂牺牲层形成具有气隙的悬浮膜栅作为绝缘体层。光致抗蚀剂的粘度和旋转速度用于在涂覆过程中改变气隙的厚度。当力改变气隙的厚度时，通过监测TFT的漏极电流来测量触力。最佳的栅极尺寸和较低的栅极材料杨氏模量提高了器件的灵敏度。这种简单的工艺有可能生产出小型，多功能，