In this study, the Al_0.5CoCrFeNi₂ high entropy alloy (HEA) powders fabricated via vacuum gas-atomization were applied to deposit two different coatings by plasma-spraying and sputtering processes. The as-atomized powders possessed an initial status of single face-centered cubic (FCC) phase, uniform element distribution and spherical shape. Further, the powders were plasma-sprayed onto stainless steels with various spraying powers. The results showed that a higher current could induce the powders fully melted, resulting in a dense coating layer and fewer defects such as voids and unmelted powders. While the current raised from 500 to 750 A, the element distribution kept uniform throughout the coating layer and the phase constitution stayed at the initial condition of pure FCC phase. The hardness of dense spraying coatings exhibited an increasing trend from HV206 to HV271 with spraying currents. In addition, the atomized Al_0.5CoCrFeNi₂ powders were sintered to get a homogeneous sputtering target for thin-film deposition process. The analyses of sputtering coatings still revealed that the phase constitution of pure FCC was corresponding to the raw powders. The density and deposition rate were affected by the working pressure and substrate bias. High pressure would cause energy loss, resulting in the lower density. Moreover, the substrate bias could increase the diffusion rate of metal ions to achieve the thin films with high hardness. The coating prepared by these two methods possessed the same phase constitution, which indicated that Al_0.5CoCrFeNi₂ high entropy alloy could exhibit excellent stability in high-energy occasions.

在这项研究中，Al _0.5 CoCrFeNi ₂通过等离子喷涂和溅射工艺，将通过真空气体雾化制备的高熵合金（HEA）粉末用于沉积两种不同的涂层。雾化粉末的初始状态为单面心立方（FCC）相，元素分布均匀和球形。此外，将粉末以各种喷涂功率等离子喷涂到不锈钢上。结果表明，较高的电流可以使粉末完全熔化，从而形成致密的涂层，减少缺陷，如空隙和未熔化的粉末。当电流从500 A增加到750 A时，元素分布在整个涂层中保持均匀，并且相组成保持在纯FCC相的初始状态。随着喷涂电流的增加，致密喷涂层的硬度从HV206上升到HV271。另外，雾化的铝_将0.5 CoCrFeNi ₂粉末烧结以获得用于薄膜沉积工艺的均匀溅射靶。溅射涂层的分析仍然表明，纯FCC的相构成与原始粉末相对应。密度和沉积速率受工作压力和基材偏压的影响。高压会导致能量损失，从而导致较低的密度。此外，衬底偏压可以增加金属离子的扩散速率，从而获得具有高硬度的薄膜。两种方法制备的涂层具有相同的相组成，表明Al _0.5 CoCrFeNi ₂高熵合金在高能场合具有良好的稳定性。