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A novel scheme to measure 2D error motions of linear axes by regulating the direction of a laser interferometer
Precision Engineering ( IF 3.6 ) Pub Date : 2020-09-14 , DOI: 10.1016/j.precisioneng.2020.09.011
Soichi Ibaraki , Mashu Hiruya

In the standardized accuracy test procedures for machine tools, error motions of a linear axis, i.e. the linear positioning, straightness, and angular error motions, are separately measured in a different setup with a different measuring instrument. This paper presents a novel scheme to measure all the two-dimensional (2D) error motions of two linear axes by using a laser interferometer only. The proposed test consists of (1) direct measurement of the linear positioning deviation of two linear axes, and (2) the distance measurement to the retroreflector, positioned by the two linear axes on a rectangular path, by continuously regulating the laser beam direction of a laser interferometer. It requires a laser interferometer only; lower implementation cost is its major practical advantage. As an experimental case study, the proposed scheme is applied to a large-sized machine tool. The uncertainty analysis is also presented.



中文翻译:

通过调节激光干涉仪的方向来测量线性轴的二维误差运动的新方案

在用于机床的标准化精度测试程序中,线性轴的误差运动,即线性定位,直线度和角度误差运动,是使用不同的测量仪器在不同的设置中分别测量的。本文提出了一种仅使用激光干涉仪来测量两个线性轴的所有二维(2D)误差运动的新颖方案。拟议的测试包括(1)直接测量两个线性轴的线性定位偏差,以及(2)通过连续调节激光束的方向来测量两个线性轴在矩形路径上定位的向后反射器的距离。激光干涉仪。它仅需要激光干涉仪;较低的实施成本是其主要的实践优势。作为实验案例研究,该方案适用于大型机床。还介绍了不确定性分析。

更新日期:2020-10-06
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