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Fabrication of micro-pyramid arrays on PETG films by roll-to-roll hot embossing
Microelectronic Engineering ( IF 2.6 ) Pub Date : 2016-10-01 , DOI: 10.1016/j.mee.2016.08.001
Wenjun Li , Yinghao Zhai , Peiyun Yi , Yong Zhang

Roll-to-roll hot embossing is a promising method for micro-structures fabrication with high throughput. Micro-pyramid arrays with the average height of 65µm and the bottom edge length of 175µm were successfully fabricated on optical transparent poly(ethylene terephthalate-co-1,4-cylclohexylenedimethylene terephthalate) (PETG) films via roll-to-roll hot embossing. No whitening caused by crystallization happened on PETG films during embossing. The effects of roller temperature, roller speed and applied force on the replication quality of micro-pyramid arrays were investigated. According to the effects we studied, the embossing conditions can be optimized for fabrication of high micro-pyramid arrays with low defects percentage. Optical microscope images show that micro-pyramid arrays with the average height over 60µm have good reflection performance. The PETG films with micro-pyramid arrays can be of applications in reflective films field. Display Omitted Micro-pyramid arrays were fabricated on PETG films by roll-to-roll hot embossing.High roller temperature favors forming of micro-pyramid arrays but will cause film damage.Increase of roller speed will lead to higher defect density.Micro-pyramid arrays on PETG films have good performance of light reflection.

中文翻译:

通过卷对卷热压印在 PETG 薄膜上制造微金字塔阵列

卷对卷热压印是一种很有前途的高产量微结构制造方法。通过卷对卷热压印在光学透明聚(对苯二甲酸乙二醇酯-co-1,4-环己基二甲基对苯二甲酸酯)(PETG)薄膜上成功制造了平均高度为65μm和底边长度为175μm的微金字塔阵列。PETG薄膜在压花过程中没有发生因结晶引起的白化。研究了滚筒温度、滚筒速度和施加的力对微金字塔阵列复制质量的影响。根据我们研究的效果,可以优化压花条件以制造具有低缺陷百分比的高微金字塔阵列。光学显微镜图像显示平均高度超过60μm的微金字塔阵列具有良好的反射性​​能。具有微金字塔阵列的PETG薄膜可应用于反射薄膜领域。显示省略微金字塔阵列是通过卷对卷热压印在PETG薄膜上制造的。高辊温度有利于微金字塔阵列的形成,但会造成薄膜损坏。提高辊速度会导致更高的缺陷密度。 PETG薄膜上的阵列具有良好的光反射性能。
更新日期:2016-10-01
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