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Features of Pore Nucleation in p-Si during Its Electrochemical Etching
Doklady Chemistry ( IF 0.8 ) Pub Date : 2019-07-01 , DOI: 10.1134/s0012500819070012
E. N. Abramova , A. M. Khort , A. G. Yakovenko , Yu. V. Syrov , V. N. Tsygankov , E. A. Slipchenko , V. I. Shvets

Features of the formation of porous silicon layers during anodic etching of p-Si were considered. A fundamental difference between the mechanisms of the formation of nanostructured layers on p-and n-Si was shown.

中文翻译:

p-Si电化学刻蚀过程中孔隙成核特征

考虑了在阳极蚀刻 p-Si 期间形成多孔硅层的特征。显示了在 p-Si 和 n-Si 上形成纳米结构层的机制之间的根本区别。
更新日期:2019-07-01
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