In this report, we present improved NO₂ gas sensing properties based on CdTe-functionalized ZnO filled porous Si (PSi) hybrid hierarchical nanostructured thin films (CdTe/ZnO@PSi). The CdTe and ZnO nanostructured thin films were grown on the PSi substrate using a scalable magnetron sputtering technique. The PSi substrate was prepared using the electrochemical anodization method. The proposed CdTe/ZnO@PSi sensor was characterized in terms of structural, morphological, and compositional properties. The sensing performance and corresponding mechanism of NO₂ gas sensor based on CdTe/ZnO@PSi were described comprehensively. In order to compare, the sensing characteristics of both CdTe/ZnO@PSi and pristine ZnO@PSi thin film sensors were tested in different temperature range varied from 30 °C to 180 °C for 1 ppm concentration of NO₂ gas. We found that CdTe/ZnO@PSi sensor displays enhanced NO₂ sensing characteristics (∼3.5-fold greater sensor response ∼19.82 %, fast response/recovery time ∼13 s/54 s) at the relatively low working temperature of 90 °C towards 1 ppm NO₂ gas in comparison to the pristine ZnO@PSi sensor (sensor response ∼5.72 % and response/recovery time ∼41 s/124 s at an operating temperature of 150 °C). Further, the fabricated NO₂ gas sensor demonstrated excellent reversibility and good stability, and enabling CdTe/ZnO@PSi a promising candidate for its practical use in IoT sensing devices.

在此报告中，我们基于CdTe功能化的ZnO填充多孔Si（PSi）混合分层纳米结构薄膜（CdTe / ZnO @ PSi），提出了改进的NO ₂气敏特性。使用可扩展的磁控溅射技术，在PSi衬底上生长CdTe和ZnO纳米结构薄膜。使用电化学阳极氧化方法制备PSi衬底。拟议的CdTe / ZnO @ PSi传感器的结构，形态和组成特性均得到了表征。NO ₂的传感性能及相应机理全面介绍了基于CdTe / ZnO @ PSi的气体传感器。为了进行比较，在1 ppm浓度的NO ₂气体从30°C到180°C的不同温度范围内，测试了CdTe / ZnO @ PSi和原始ZnO @ PSi薄膜传感器的感测特性。我们发现CdTe / ZnO @ PSi传感器在90°C的较低工作温度下朝着90°C的较低温度显示了增强的NO ₂感测特性（约3.5倍的传感器响应〜19.82％，快速的响应/恢复时间约13s / 54 s）。与原始ZnO @ PSi传感器相比，NO ₂气体为1 ppm （在150°C的工作温度下，传感器响应约为5.72％，响应/恢复时间约为41 s / 124 s）。此外，制造的NO ₂ 气体传感器具有出色的可逆性和良好的稳定性，使CdTe / ZnO @ PSi成为其在物联网传感设备中实际应用的有希望的候选者。