Abstract Accurate phase detection and control of nonlinear resonant micro-opto-electro-mechanical system (MOEMS) mirrors are crucial to achieve stable scanning motions and high resolution imaging as needed in precision applications. This paper proposes a precise phase detection method for an electrostatic actuated MOEMS mirror and a novel digital phase locked loop (PLL) that uses an asynchronous logic for high precision driving and immediate phase compensation, while the clock speed is kept low. The phase of the mirror is detected by an amplified current signal, generated by the movement of the comb drive electrodes, transimpedance amplifiers and a simple comparator circuit. An analysis of the proposed detection method reveals that the pointing uncertainty scales with the product of the driving voltage, the curvature of the comb drive capacitance and the angular velocity of the MOEMS mirror at the zero crossing. The developed fast start-up procedure brings the MOEMS mirror to its maximum amplitude within less than 100 ms with a minimum on required prior knowledge of the used device. The low optical pointing uncertainty of 0.3 mdeg obtained in closed loop operation, allows 19000 pixels with a precision of 10 sigma at a scanning frequency of 2 kHz.

中文翻译：

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通过梳状驱动电流反馈对谐振 MOEMS 反射镜进行精确相位控制

摘要 非线性谐振微光机电系统 (MOEMS) 反射镜的精确相位检测和控制对于实现精密应用中所需的稳定扫描运动和高分辨率成像至关重要。本文提出了一种静电驱动 MOEMS 反射镜的精确相位检测方法和一种新型数字锁相环 (PLL)，该方法使用异步逻辑进行高精度驱动和即时相位补偿，同时保持低时钟速度。反射镜的相位由放大的电流信号检测，该信号由梳状驱动电极的移动、跨阻放大器和简单的比较器电路产生。对所提出的检测方法的分析表明，指向不确定性与驱动电压的乘积成比例，梳状驱动电容的曲率和 MOEMS 镜在零交叉处的角速度。开发的快速启动程序使 MOEMS 反射镜在不到 100 ms 的时间内达到其最大振幅，并且所需的所用设备的先验知识最少。在闭环操作中获得 0.3 mdeg 的低光学指向不确定性，允许在 2 kHz 的扫描频率下以 10 sigma 的精度获得 19000 个像素。