Abstract Optical micro structure arrays, with regular geometrical morphology such as micro groove array, pyramid array, triangular pyramid array, etc., are widely used in optical components due to their unique optical properties. The machining of these micro structure arrays needs the cooperation of the multi linear axes of precision machine tools, while the lack of certain linear axis (e.g. Y-axis) limits the machining of such micro structure arrays. In this paper, a novel offset-fly-cutting-servo (OFCS) machining system was developed, which can fabricate the straight-groove-type micro structure arrays under the general configuration (X-, Z-, C-axis) of commercial ultra-precision machine tools. In this paper, a mathematical model for tool arc trajectory linearization compensation was established. Then the machining scheme was designed and cutting experiments of micro groove array, pyramid array and triangular pyramid array were performed. Finally, the machined and designed morphology of the micro structure arrays were compared and analyzed. Theoretical and experimental results show that the machined and designed morphology of the micro structure arrays match well, the root mean square (RMS) value of the form error of micro groove array, pyramid array and triangular pyramid array are below 1 μm. It confirmed that the proposed OFCS is an effective machining method for the straight-groove-type micro structure arrays. It provides a technical solution for machining straight-groove-type micro structure array in the absence of linear axis of ultra-precision machine tools, also provides theoretical reference for other machining of complex micro structure arrays.

中文翻译：

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新型刀具偏置飞切直槽型微结构阵列

摘要 具有规则几何形态的光学微结构阵列，如微槽阵列、棱锥阵列、三角棱锥阵列等，由于其独特的光学特性而被广泛应用于光学元件中。这些微结构阵列的加工需要精密机床的多条直线轴的配合，而某些直线轴（如Y轴）的缺乏限制了这种微结构阵列的加工。本文开发了一种新型的偏置飞切伺服（OFCS）加工系统，该系统可以在商业化的一般配置（X轴，Z轴，C轴）下制造直槽型微结构阵列。超精密机床。本文建立了刀具圆弧轨迹线性化补偿的数学模型。然后设计了加工方案，并进行了微槽阵列、棱锥阵列和三角棱锥阵列的切削实验。最后，对微结构阵列的加工和设计形态进行了比较和分析。理论和实验结果表明，加工和设计的微结构阵列形貌匹配良好，微槽阵列、棱锥阵列和三角棱锥阵列的形状误差均方根(RMS)值均在1 μm以下。它证实了所提出的 OFCS 是一种有效的直槽型微结构阵列加工方法。为超精密机床无直线轴的情况下加工直槽型微结构阵列提供了技术解决方案，