Wire electrochemical micromachining (WECMM) is a non-traditional technique that is suitable for micro-structures processing of metallic glass (MG). The composition of metallic glass is complex, and the electrochemical characteristics of metallic elements are different, which greatly increases the difficulty of high-quality electrochemical micromachining of MG. In this study, the electrochemical dissolution characteristics of the amorphous material, Ni₈₂Cr₇Si₅Fe₃B₃, are analyzed in detail. The AC impedance spectrum and dissolution states of MG in 0.1 M NaCl, NaNO₃, HCl, and H₂SO₄ solutions are explored, and the dissolution characteristics of metal elements in Ni₈₂Cr₇Si₅Fe₃B₃ are also investigated to determine the electrolytic properties of MG. By comparing the results of WECMM experiments in different solutions, the appropriate solution was chosen as electrolyte, and the effects of different parameters on WECMM of Ni₈₂Cr₇Si₅Fe₃B₃ were studied. Finally, the optimal processing parameters achieved by the experiments, 0.25 M dilute H₂SO₄ solution, ultrashort pulse voltage amplitude 7 V, pulse period 3 μs, a pulse duration of 90 ns and a feed rate of 0.2 μm/s were applied to complete the machining of the MG micro-slits. And several complex micro-structures with good surface morphology were thus obtained. For example, a gear with an index circle diameter of 1 mm, a curved cantilever beam with a width of 30.5 μm and a micro round wheel with the thickness of 100 μm.

线电化学微加工（WECMM）是一种非传统技术，适用于金属玻璃（MG）的微结构加工。金属玻璃的组成复杂，金属元素的电化学特性不同，大大增加了MG高质量电化学微加工的难度。在这项研究中，详细分析了非晶态材料Ni ₈₂ Cr ₇ Si ₅ Fe ₃ B ₃的电化学溶解特性。MG在0.1 M NaCl，NaNO ₃，HCl和H ₂ SO _4中的交流阻抗谱和溶解状态探索溶液，并研究了金属元素在Ni ₈₂ Cr ₇ Si ₅ Fe ₃ B ₃中的溶解特性，以确定MG的电解性能。通过比较不同溶液中WECMM实验的结果，选择合适的溶液作为电解液，研究了不同参数对Ni ₈₂ Cr ₇ Si ₅ Fe ₃ B _3的WECMM的影响。最后，通过实验获得的最佳工艺参数是0.25 M稀H ₂ SO ₄解决方案是应用超短脉冲电压幅度7 V，脉冲周期3μs，脉冲持续时间90 ns和进给速度0.2μm/ s，以完成MG微缝的加工。从而获得了几种具有良好表面形貌的复杂微观结构。例如，分度圆直径为1 mm的齿轮，宽度为30.5μm的弯曲悬臂梁以及厚度为100μm的微型轮。