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Effect of the Focusing of a SEM Probe on the Formation of Relief Structure Images
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques ( IF 0.5 ) Pub Date : 2020-07-07 , DOI: 10.1134/s1027451020030106 Yu. A. Novikov
中文翻译:
SEM探针聚焦对凸版结构图像形成的影响
更新日期:2020-07-07
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques ( IF 0.5 ) Pub Date : 2020-07-07 , DOI: 10.1134/s1027451020030106 Yu. A. Novikov
Abstract
The effect of focusing a scanning electron microscope probe on the formation of relief structure images is studied in secondary slow electron and backscattering electron collection modes. Protrusions and grooves in silicon with a trapezoidal profile and large inclination angles of lateral walls are used in the experiments. In the defocusing process the probe diameter is increased up to 8 times. It is shown that the image obtained in the secondary slow electron mode greatly varies, while the image acquired in the backscattering electron mode remains unchanged within the noise. The areas of signals strongly affected by the SEM probe are specified as well. According to the results, SEM focusing is necessary for only the secondary slow electron collection mode.中文翻译:
SEM探针聚焦对凸版结构图像形成的影响