ABSTRACT We studied electrically forced, transient thickness-extensional vibration of piezoelectric plates of crystals of class 6 mm as thin film bulk acoustic wave resonators. A generalized Fourier series solution was obtained and verified by comparison with finite element numerical analysis. The transient processes of the startup or shutting down of a resonator was examined. It was found that for a typical thin film resonator of ZnO or AlN with a 2 µm thickness, a fundamental thickness-extensional frequency of 1–2 GHz, and a damping described by a material quality factor of 105, the characteristic startup time from rest to time-harmonic motion is about 0.1 millisecond.

中文翻译：

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薄膜体声波压电谐振器的瞬态过程

摘要 我们研究了作为薄膜体声波谐振器的 6 mm 级晶体压电板的电动、瞬态厚度延伸振动。通过与有限元数值分析的比较，获得并验证了广义傅里叶级数解。检查了谐振器启动或关闭的瞬态过程。发现对于典型的 ZnO 或 AlN 薄膜谐振器，厚度为 2 µm，基本厚度扩展频率为 1-2 GHz，阻尼由材料品质因数描述为 105，从静止开始的特征启动时间时谐运动约为 0.1 毫秒。