Abstract We perform a theoretical analysis on thin film bulk acoustic wave piezoelectric resonators operating with high overtone thickness-extensional modes. The scalar differential equations by Tiersten and Stevens are used for the electroded and unelectroded parts of the resonator, respectively. An analytical solution is obtained for the free vibration of the resonator. Frequencies and modes are calculated based on the solution. Numerical results show that there exist modes with vibration mainly trapped under the driving electrode. The effects of the structural parameters on the behaviors of the trapping are examined.

中文翻译：

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高泛音薄膜体声波压电谐振器中的陷获厚度扩展模式

摘要 我们对以高泛音厚度扩展模式工作的薄膜体声波压电谐振器进行了理论分析。Tiersten 和 Stevens 的标量微分方程分别用于谐振器的电极部分和非电极部分。获得了谐振器自由振动的解析解。频率和模式是根据解决方案计算的。数值结果表明，驱动电极下方存在以振动为主的模态。检查了结构参数对诱捕行为的影响。