Abstract A barium strontium titanate Ba0.65Sr0.35TiO3 and its lithium (Li) and copper (Cu) doped thin films have fabricated on quartz substrates based on sol-gel and spin-coating method. Chemical solution deposition with spin-coating technique deposited the thin films. The addition of Li and Cu dopants lead to the change of lattice constant and the change of grain size. From Scherrer’s equation, it found that BLST and BCST thin films have larger and smaller grain size than that of BST, respectively. It also revealed that the crystal structures formed in a phase between cubic and tetragonal structure. Scanning electron microscopy was confirmed homogenous surfaces of thin film and energy dispersive x-ray was showed chemical composition according to the considered stoichiometry.

中文翻译：

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Li和Cu掺杂对Ba0.65Sr0.35TiO3薄膜晶体结构的影响

摘要 采用溶胶-凝胶法和旋涂法在石英衬底上制备了钛酸锶钡Ba0.65Sr0.35TiO3及其锂（Li）和铜（Cu）掺杂薄膜。使用旋涂技术的化学溶液沉积沉积薄膜。Li和Cu掺杂剂的加入导致晶格常数的变化和晶粒尺寸的变化。从 Scherrer 方程可以看出，BLST 和 BCST 薄膜的晶粒尺寸分别比 BST 的大和小。它还揭示了晶体结构在立方和四方结构之间的相中形成。根据所考虑的化学计量，扫描电子显微镜证实薄膜的均匀表面和能量色散 X 射线显示化学成分。