A high pulse energy vacuum ultraviolet (VUV) 177.3 nm nanosecond (ns) laser generated from the sixth harmonic generation of an ns 1064 nm laser (10 ns, 10 Hz) was reported. Firstly, a frequency tripled UV pulse energy of 21.35 mJ at 355 nm was obtained with a pulse duration of 5 ns at a pump pulse energy of 150.6 mJ at 1064 nm. By a KBe 2 BO 3 F 2 (KBBF) prism coupled device containing a 1.6 mm thick KBBF crystal, a VUV maximum pulse energy of 0.375 mJ at 177.3 nm was achieved with an second harmonic conversion efficiency of 1.76% from UV–VUV. This is, to the best of our knowledge, the highest output energy for VUV-diode pumped solid state lasers . At this condition, the pulse width at 177.3 nm was deduced to be 3.6 ns. This VUV coherent light can be used precisely as the light source of the processing material.

中文翻译：

---

KBBF晶体产生具有高脉冲能量的177.3 nm VUV激光器

据报道，这是由ns 1064 nm激光器（10 ns，10 Hz）的六次谐波产生的高脉冲能量真空紫外（VUV）177.3 nm纳秒（ns）激光器。首先，在1064 nm的泵浦脉冲能量为150.6 mJ的情况下，以5 ns的脉冲持续时间获得了355 nm处的21.35 mJ频率的三倍UV脉冲能量。通过包含1.6 mm厚KBBF晶体的KBe 2 BO 3 F 2（KBBF）棱镜耦合器件，在177.3 nm处实现了VUV最大脉冲能量0.375 mJ，其二次谐波转换效率是UV-VUV的1.76％。据我们所知，这是VUV二极管泵浦固态激光器的最高输出能量。在这种条件下，在177.3 nm处的脉冲宽度被推算为3.6 ns。这种VUV相干光可以精确地用作处理材料的光源。