Negative atomic hydrogen ion (H − ) densities were measured in a pulsed low-pressure E-mode inductively-coupled radio-frequency (rf) driven plasma in hydrogen by means of laser photodetachment and a Langmuir probe. This investigation focuses on the influence of different metallic surface materials on the volume production of H − ions. The H − density was measured above a thin disc of either tungsten, stainless steel, copper, aluminium, or molybdenum placed onto the lower grounded electrode of the plasma device as a function of gas pressure and applied rf power. For copper, aluminium, and molybdenum the H − density was found to be quite insensitive to pressure and rf power, with values ranging between 3.6 × 10 14 to 5.8 × 10 14 m −3 . For stainless steel and tungsten, the H − dependency was found to be complex, apart from the case of a similar linear increase from 2.9 × 10 14 to 1.1 × 10 1...

中文翻译：

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表面材料对射频驱动氢等离子体中负离子体积产生的影响

借助于激光光分离和Langmuir探针，在氢气中的脉冲低压E型感应耦合射频（rf）驱动等离子体中测量了负原子氢离子（H-）的密度。这项研究的重点是不同的金属表面材料对H-离子量产的影响。在气体，压力和射频功率的函数下，测量放置在等离子装置下部接地电极上的钨，不锈钢，铜，铝或钼薄盘上方的H-密度。对于铜，铝和钼，发现H-密度对压力和rf功率非常不敏感，其值在3.6×10 14至5.8×10 14 m -3之间。对于不锈钢和钨，H-依赖性很复杂，