Abstract In this paper, ZnO thin films were elaborated onto hot glass substrates by ultrasonic spray pyrolysis technique. The solution contains zinc acetate dehydrate mixed with methanol with solution concentration equals 0.1 mol/L. The effect of the substrate temperature on the properties of ZnO was investigated. All films deposited were characterized by various techniques such as X-ray diffraction to examine the films structure and UV-Visible spectroscopy to determine the optical proprieties. The obtained results show that films are polycrystalline at hexagonal shape type wurtzite in structure. The crystallite size is varied between 10.36 and 71.1 nm, the optical transmission leads to 90% in visible rang, the optical band gap is varied from 3.22 to 3.28 eV and the electrical resistivity is found between 1.42 Ω cm and 17.60 Ω cm. The elaborated films have UV emission located at 380 nm.

中文翻译：

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超声喷涂法控制不同衬底温度下沉积的ZnO纳米晶薄膜的c轴位置。

摘要 本文采用超声喷雾热解技术在热玻璃基板上制备了ZnO薄膜。该溶液含有与甲醇混合的脱水乙酸锌，溶液浓度等于 0.1 mol/L。研究了衬底温度对ZnO性能的影响。所有沉积的薄膜都通过各种技术进行表征，例如 X 射线衍射来检查薄膜结构和紫外-可见光谱以确定光学特性。所得结果表明薄膜在结构上为六方型纤锌矿多晶。微晶尺寸在 10.36 和 71.1 nm 之间变化，可见光范围内的光透射率达到 90%，光学带隙从 3.22 到 3.28 eV，电阻率在 1.42 Ω cm 和 17.60 Ω cm 之间。