In this study a novel approach using pulsed-DC plasma enhanced chemical vapour deposition (DC-PECVD) to incorporate tungsten oxide nanoparticles into diamond-like carbon coatings (DLC) thin film deposited on tappet valve (metallic substrate) was successfully achieved. The DLC-W film obtained by incorporating WO₃ nanoparticles into DLC was characterized using scanning electron microscope/energy dispersive spectroscopy (SEM/EDS), X-ray diffraction (XRD), Raman spectroscopy, scratch test, Rockwell C indention test and nano-hardness measurement. The thickness, hardness and elastic modulus were measured as 789.11 ± 16 nm, 18.64 ± 0.11 GPa and 152.03 ± 2.1 GPa respectively. The I_D/I_G was 0.95, D and G peaks positioned at 1341.66 and 1562.17 cm⁻¹ respectively and W₂C was observed from the XRD. The coating had a low apparent COF of 0.075 and excellent adhesion properties.

在这项研究中，成功​​实现了使用脉冲直流等离子体增强化学气相沉积（DC-PECVD）的新方法，将氧化钨纳米颗粒掺入沉积在挺杆阀（金属基底）上的类金刚石碳涂层（DLC）薄膜中。通过使用扫描电子显微镜/能量色散光谱（SEM / EDS），X射线衍射（XRD），拉曼光谱，划痕测试，罗克韦尔C压痕测试和纳米级扫描电镜对通过将WO ₃纳米粒子掺入DLC所获得的DLC-W膜进行表征。硬度测量。测得的厚度，硬度和弹性模量分别为789.11±16 nm，18.64±0.11 GPa和152.03±2.1 GPa。I _D / I _G为0.95，D和G峰位于1341.66和1562.17 cm ^-1分别和W ₂ C来自所述XRD进行了观察。该涂层具有0.075的低表观COF和优异的粘合性能。