We propose a novel spectroscopic ellipsometry capable of measuring line profile of the film thicknesses with a single image at once. By adopting a polarization-pixelated CMOS camera and an imaging spectrometer, spatial, spectral and polarization information of the film structure can be acquired at the frame rate of the camera without any mechanical or electrical adjustments of polarizing optical components. The proposed system is beneficial not only to provide film thickness of the specimen with a single image acquisition, but also to analyze the spatial features of the film layers.

中文翻译：

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多层膜厚度的单线轮廓测量

我们提出了一种新颖的椭圆偏振光谱法，能够一次测量单个图像的膜厚线轮廓。通过采用偏振像素化CMOS相机和成像光谱仪，可以在相机的帧频下获取胶片结构的空间，光谱和偏振信息，而无需对偏振光学组件进行任何机械或电气调整。所提出的系统不仅有益于提供具有单个图像采集的样本的膜厚，而且有益于分析膜层的空间特征。