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Fast and Flexible Non-Null Testing of Aspheres and Free-Form Surfaces with the Tilted-Wave-Interferometer
International Journal of Optomechatronics ( IF 6.7 ) Pub Date : 2014-10-27 , DOI: 10.1080/15599612.2014.942925
Goran Baer , Johannes Schindler , Christof Pruss , Jens Siepmann , Wolfgang Osten

The Tilted-Wave-Interferometer (TWI) is a non-null, full-field interferometric measuring technique for aspheric and free-form surfaces with a new degree of flexibility. The interferometer uses a set of tilted wavefronts to locally compensate the deviation of the surface under test from its spherical form. Since it is a non-null technique, there is no need for costly compensation optics. The measurement data acquisition is highly parallelized, leading to a short measurement time in the region of few seconds, by simultaneously achieving a high lateral resolution. The unique combination of these characteristics makes the TWI a perfect candidate for the integration into the process chain of aspheric and free-form surface manufacturing.



中文翻译:

使用倾斜波干涉仪快速,灵活地对非球面和自由曲面进行非零测试

倾斜波干涉仪(TWI)是一种用于非球面和自由曲面的非空全场干涉测量技术,具有新的灵活性。干涉仪使用一组倾斜的波前来局部补偿被测表面与其球形形状之间的偏差。由于这是一种非零技术,因此不需要昂贵的补偿光学器件。测量数据采集高度并行化,通过同时实现高横向分辨率,可缩短几秒钟的测量时间。这些特性的独特结合使TWI成为了非球面和自由曲面制造工艺链集成的理想选择。

更新日期:2014-10-27
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