Based on the subsurface damage model and the material removal rate of K9 glass in HF acid solution, a fast method is proposed to calculate the parameters of characterizing the subsurface damage of a polished sample. When micro cracks of the etched sample's subsurface can be clearly observed, lengths, widths, angles, densities of the micro cracks can be calculated by using the image processing algorithm, and depths of the micro cracks may be predicted by the load-crack model. Eventually a set of the parameters are proposed as a complete description about subsurface damage of the sample.

中文翻译：

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快速预测K9样品的统计地下破坏参数

基于亚表面损伤模型和HF酸溶液中K9玻璃的材料去除率，提出了一种快速的方法来计算表征抛光样品亚表面损伤的参数。当可以清楚地观察到蚀刻样品表面的微裂纹时，可以通过使用图像处理算法来计算微裂纹的长度，宽度，角度，密度，并且可以通过载荷裂纹模型来预测微裂纹的深度。最终提出了一组参数，作为关于样品表面下损伤的完整描述。