This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme.

本文介绍了基于二维微镜的激光扫描显微镜系统的鲁棒非线性控制方案的开发和实现。提出了基于滑模控制方法并增加自适应算法的控制方案，以提高存在交叉轴效应时的跟踪精度。通过集成带有侧壁电极（SW）的二维微镜，激光源，NI现场可编程门阵列（FPGA）硬件，光学器件，位置感应检测器（PSD）和光电检测器来开发闭环受控成像系统（PD）。实验结果表明，该方案能够实现对参考三角信号的精确跟踪。与开环控制相比，扫描性能大大提高，