An optical inspection platform combining parallel image processing with high resolution opto-mechanical module was developed for defect inspection of touch panel glass. Dark field images were acquired using a 12288-pixel line CCD camera with 3.5 µm per pixel resolution and 12 kHz line rate. Key features of the glass surface were analyzed by parallel image processing on combined CPU and GPU platforms. Defect inspection of touch panel glass, which provided 386 megapixel image data per sample, was completed in roughly 5 seconds. High detection rate of surface scratches on the touch panel glass was realized with minimum defects size of about 10 µm after inspection. The implementation of a custom illumination source significantly improved the scattering efficiency on the surface, therefore enhancing the contrast in the acquired images and overall performance of the inspection system.

开发了将并行图像处理与高分辨率光电机械模块相结合的光学检测平台，用于触摸屏玻璃的缺陷检测。暗场图像是使用12288像素的线CCD相机获取的，每像素分辨率为3.5 µm，线速为12 kHz。通过在组合的CPU和GPU平台上进行并行图像处理，分析了玻璃表面的关键特征。触摸面板玻璃的缺陷检查大约在5秒钟内完成，该面板每个样品提供386兆像素的图像数据。检查后，可以实现触摸屏玻璃表面划痕的高检测率，最小缺陷尺寸约为10 µm。自定义照明源的实施大大提高了表面上的散射效率，