Surface-enhanced Raman scattering (SERS) have numerous applications in areas such as analytical chemistry, biochemistry, and environmental science. However to manufacture SERS active substrates with good reproducibility and low cost is not easy, which hinder the SERS technology from being widespread in various applications. In this study, we developed a batch producible hot embossing 3D nanostructured SERS substrate technology for SERS applications. This study utilized the anodic aluminum oxide (AAO) self-assembled uniform nano-hemispherical array barrier layer as a template to create a durable nanostructured nickel mold. With the hot embossing technique and the durable nanostructured nickel mold, we were able to batch produce the 3D Nanostructured SERS chip with consistent quality and low cost. In addition, according to the SERS experiments, the 3D nano-hemispherical cavity array combined with sub-10-nm-gaps Au NPs showed distinct SERS signals in both Rhodamine 6G and Chlorpyrifos measurements. Therefore, the developed method is good to be used extensively in rapid chemical and biomolecular detection applications.

表面增强拉曼散射（SERS）在分析化学，生物化学和环境科学等领域具有广泛的应用。然而，要制造具有良好的再现性和低成本的SERS活性基材并不容易，这阻碍了SERS技术在各种应用中的广泛应用。在这项研究中，我们为SERS应用开发了可批量生产的热压印3D纳米结构SERS基板技术。这项研究利用阳极氧化铝（AAO）自组装的均匀纳米半球形阵列阻挡层作为模板来创建耐用的纳米结构镍模具。借助热压花技术和耐用的纳米结构镍模，我们能够批量生产质量稳定，成本低廉的3D纳米结构SERS芯片。此外，根据SERS实验，在罗丹明6G和毒死rif的测量中，结合了低于10 nm间隙的Au NP的3D纳米半球腔阵列均显示出独特的SERS信号。因此，所开发的方法很好地广泛用于快速化学和生物分子检测应用中。